The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas

Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

(2014) André Anders   APPLIED PHYSICS LETTERS

Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents

(2014) Andre Anders et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium

(2014) C Maszl et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons

(2014) A Hecimovic et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

(2014) Matjaž Panjan et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

(2014) Teresa de los Arcos et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

(2013) Joakim Andersson et al.   APPLIED PHYSICS LETTERS

Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering

(2013) André Anders et al.   APPLIED PHYSICS LETTERS

Current–voltage characteristics and fast imaging of HPPMS plasmas: transition from self-organized to homogeneous plasma regimes

(2013) T de los Arcos et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Spokes and charged particle transport in HiPIMS magnetrons

(2013) N Brenning et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity

(2013) J Winter et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Rotating Instability in Low-Temperature Magnetized Plasmas

(2013) Jean-Pierre Boeuf et al.   PHYSICAL REVIEW LETTERS

High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

(2012) A. P. Ehiasarian et al.   APPLIED PHYSICS LETTERS

Plasma flares in high power impulse magnetron sputtering

(2012) Pavel A. Ni et al.   APPLIED PHYSICS LETTERS

Self-organization and self-limitation in high power impulse magnetron sputtering

(2012) André Anders   APPLIED PHYSICS LETTERS

Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

(2012) André Anders et al.   JOURNAL OF APPLIED PHYSICS

An introduction to thin film processing using high-power impulse magnetron sputtering

(2012) Daniel Lundin et al.   JOURNAL OF MATERIALS RESEARCH

High power impulse magnetron sputtering discharge

(2012) J. T. Gudmundsson et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Alfvén's critical ionization velocity observed in high power impulse magnetron sputtering discharges

(2012) N. Brenning et al.   PHYSICS OF PLASMAS

Cross-field electron transport induced by a rotating spoke in a cylindrical Hall thruster

(2012) C. L. Ellison et al.   PHYSICS OF PLASMAS

Two-dimensional electric current effects on a magnetized plasma in contact with a surface

(2012) A E Shumack et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics

(2012) C Vitelaru et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Estimating electron drift velocities in magnetron discharges

(2012) Albert Rauch et al.   VACUUM

Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

(2011) A. V. Kozyrev et al.   PLASMA PHYSICS REPORTS

Discharge physics of high power impulse magnetron sputtering

(2011) André Anders   SURFACE & COATINGS TECHNOLOGY

Plasma Parameters in a Pre-Ionized HiPIMS Discharge Operating at Low Pressure

(2010) Phitsanu Poolcharuansin et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Cathode Current Density Distributions in High Power Impulse and Direct Current Magnetron Sputtering Modes

(2009) Gregory Clarke et al.   Plasma Processes and Polymers

Anomalous electron transport in high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Cross-field ion transport during high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY