Non-uniform plasma distribution in dc magnetron sputtering: origin, shape and structuring of spokes

Published 2015 View Full Article

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Title
Non-uniform plasma distribution in dc magnetron sputtering: origin, shape and structuring of spokes
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 6, Pages 065010
Publisher
IOP Publishing
Online
2015-10-27
DOI
10.1088/0963-0252/24/6/065010

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