Heteroepitaxy of N-type β-Ga2O3 thin films on sapphire substrate by low pressure chemical vapor deposition
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Title
Heteroepitaxy of N-type β-Ga2O3 thin films on sapphire substrate by low pressure chemical vapor deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 13, Pages 132103
Publisher
AIP Publishing
Online
2016-09-29
DOI
10.1063/1.4963820
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