Growth and etching characteristics of gallium oxide thin films by pulsed laser deposition

Title
Growth and etching characteristics of gallium oxide thin films by pulsed laser deposition
Authors
Keywords
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Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 133, Issue 2-3, Pages 700-705
Publisher
Elsevier BV
Online
2012-02-22
DOI
10.1016/j.matchemphys.2012.01.060

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