Homoepitaxial growth of β-Ga2O3layers by halide vapor phase epitaxy

Published 2014 View Full Article

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Title
Homoepitaxial growth of β-Ga2O3layers by halide vapor phase epitaxy
Authors
Keywords
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Journal
Applied Physics Express
Volume 8, Issue 1, Pages 015503
Publisher
Japan Society of Applied Physics
Online
2014-12-11
DOI
10.7567/apex.8.015503

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