Large-Area MOCVD Growth of Ga2O3 in a Rotating Disc Reactor

Title
Large-Area MOCVD Growth of Ga2O3 in a Rotating Disc Reactor
Authors
Keywords
Ga<sub>2</sub>O<sub>3</sub>, thin films, MOCVD, epitaxy
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 44, Issue 5, Pages 1357-1360
Publisher
Springer Nature
Online
2014-12-12
DOI
10.1007/s11664-014-3566-7

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