Epitaxial growth of (2¯01) β-Ga2O3 on (0001) sapphire substrates by halide vapour phase epitaxy

Published 2016 View Full Article

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Title
Epitaxial growth of (2¯01) β-Ga2O3 on (0001) sapphire substrates by halide vapour phase epitaxy
Authors
Keywords
Ga, 2, O, 3, Gallium oxide, Epitaxy, HVPE
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 47, Issue -, Pages 16-19
Publisher
Elsevier BV
Online
2016-02-22
DOI
10.1016/j.mssp.2016.02.008

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