Characterization of β-Ga2O3 thin films on sapphire (0001) using metal-organic chemical vapor deposition technique

Title
Characterization of β-Ga2O3 thin films on sapphire (0001) using metal-organic chemical vapor deposition technique
Authors
Keywords
-
Journal
VACUUM
Volume 86, Issue 12, Pages 1850-1854
Publisher
Elsevier BV
Online
2012-04-19
DOI
10.1016/j.vacuum.2012.04.019

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