Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film

Impact resistance and static strength analysis of an extremely simplified micro hotplate with novel suspended film

(2018) Qi Liu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Simple Fabrication and Characterization of a Platinum Microhotplate Based on Suspended Membrane Structure

(2016) F. Samaeifar et al.   EXPERIMENTAL TECHNIQUES

Multilayer microheater based on glass substrate using MEMS technology

(2016) Wen-Yang Chang et al.   MICROELECTRONIC ENGINEERING

A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

(2016) S L Marasso et al.   NANOTECHNOLOGY

Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

(2016) Alessio Tommasi et al.   SENSORS

Design, development and reliability testing of a low power bridge-type micromachined hotplate

(2015) Mahanth Prasad   MICROELECTRONICS RELIABILITY

Implementation of high-performance MEMS platinum micro-hotplate

(2015) Fatemeh Samaeifar et al.   Sensor Review

Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

(2014) P. Bhattacharyya   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

A low-power, micromachined, double spiral hotplate for MEMS gas sensors

(2014) Mahanth Prasad et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Analytical Modeling of Square Microhotplate for Gas Sensing Application

(2013) Gaurav Saxena et al.   IEEE SENSORS JOURNAL

Liquid Phase Deposition Based ${\rm SnO}_{2}$ Gas Sensor Integrated With TaN Heater on a Micro-Hotplate

(2013) Jin-Chern Chiou et al.   IEEE SENSORS JOURNAL

Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

(2011) Woo-Jin Hwang et al.   SENSORS

Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range

(2010) J Courbat et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A high-temperature MEMS heater using suspended silicon structures

(2009) Kook-Nyung Lee et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

(2008) S.Z. Ali et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Investigation of the natural convection boundary condition in microfabricated structures

(2007) X. Jack Hu et al.   INTERNATIONAL JOURNAL OF THERMAL SCIENCES