Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
出版年份 2018 全文链接
标题
Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
作者
关键词
-
出版物
Micromachines
Volume 9, Issue 10, Pages 514
出版商
MDPI AG
发表日期
2018-10-12
DOI
10.3390/mi9100514
参考文献
相关参考文献
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