Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

(2016) S L Marasso et al.   NANOTECHNOLOGY

Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles

(2015) Paul Walden et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

(2015) F.E. Annanouch et al.   SENSORS AND ACTUATORS B-CHEMICAL

Resonating Behaviour of Nanomachined Holed Microcantilevers

(2015) Giancarlo Canavese et al.   Scientific Reports

Process optimisation of a MEMS based PZT actuated microswitch

(2014) A. Tommasi et al.   MICROELECTRONIC ENGINEERING

An Accurate and Computationally Efficient Model for Membrane-Type Circular-Symmetric Micro-Hotplates

(2014) Usman Khan et al.   SENSORS

Toward mechano-spintronics: Nanostructured magnetic multilayers for the realization of microcantilever sensors featuring wireless actuation for liquid environments

(2012) Alessandro Chiolerio et al.   JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES

Piezoelectrically actuated MEMS microswitches for high current applications

(2011) D. Balma et al.   MICROELECTRONIC ENGINEERING

Stability of thin platinum films implemented in high-temperature microdevices

(2009) R.M. Tiggelaar et al.   SENSORS AND ACTUATORS A-PHYSICAL

Devices and chemical sensing applications of metal oxide nanowires

(2008) Guozhen Shen et al.   JOURNAL OF MATERIALS CHEMISTRY

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

(2008) S.Z. Ali et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Linear temperature microhotplate gas sensor array for automotive cabin air quality monitoring

(2008) L. Francioso et al.   SENSORS AND ACTUATORS B-CHEMICAL