Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

(2012) Lei Xu et al.   IEEE ELECTRON DEVICE LETTERS

Low Temperature Fabrication of a Highly Sensitive Methane Sensor with Embedded Co-Planar Nickel Alloy Microheater on MEMS Platform

(2012) S. Roy et al.   Sensor Letters

A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate

(2012) S. Roy et al.   SOLID-STATE ELECTRONICS

A Novel Three-Dimensional Microheater

(2011) Lei Xu et al.   IEEE ELECTRON DEVICE LETTERS

A System for the Dynamic Control and Thermal Characterization of Ultra Low Power Gas Sensors

(2011) F Rastrello et al.   IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

(2011) Woo-Jin Hwang et al.   SENSORS

Mid-IR source based on a free-standing microhotplate for autonomous CO2 sensing in indoor applications

(2011) Pierre Barritault et al.   SENSORS AND ACTUATORS A-PHYSICAL

A molybdenum MEMS microhotplate for high-temperature operation

(2011) L. Mele et al.   SENSORS AND ACTUATORS A-PHYSICAL

Silicon microcantilever hotplates with high temperature uniformity

(2009) Natalya L. Privorotskaya et al.   SENSORS AND ACTUATORS A-PHYSICAL

Microfabrication and chemoresistive characteristics of SBA-15-templated mesoporous carbon gas sensors with CMOS compatibility

(2009) Chih-Cheng Lu et al.   SENSORS AND ACTUATORS B-CHEMICAL

High-performance metal oxide nanowire chemical sensors with integrated micromachined hotplates

(2008) Koungmin Ryu et al.   APPLIED PHYSICS LETTERS

Modeling and Experimental Identification of Silicon Microheater Dynamics: A Systems Approach

(2008) A. Sebastian et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Nano Initiator Realized by Integrating Al/CuO-Based Nanoenergetic Materials With a Au/Pt/Cr Microheater

(2008) Kaili Zhang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

(2008) S.Z. Ali et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane

(2008) P. Bhattacharyya et al.   MICROELECTRONICS RELIABILITY

Microhotplates with TiN heaters

(2008) J.F. Creemer et al.   SENSORS AND ACTUATORS A-PHYSICAL

Dynamic characteristics of transient boiling on a square platinum microheater under millisecond pulsed heating

(2007) J. Li et al.   INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER

Reliability improvement of suspended platinum-based micro-heating elements

(2007) J. Courbat et al.   SENSORS AND ACTUATORS A-PHYSICAL