Multilayer microheater based on glass substrate using MEMS technology

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Title
Multilayer microheater based on glass substrate using MEMS technology
Authors
Keywords
Microheater, Multilayer, Chromium nitride, Glass, Microelectromechanical systems (MEMS)
Journal
MICROELECTRONIC ENGINEERING
Volume 149, Issue -, Pages 25-30
Publisher
Elsevier BV
Online
2015-09-15
DOI
10.1016/j.mee.2015.09.005

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