Tungsten-Based SOI Microhotplates for Smart Gas Sensors

Published 2008 View Full Article

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Title
Tungsten-Based SOI Microhotplates for Smart Gas Sensors
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 6, Pages 1408-1417
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-12-04
DOI
10.1109/jmems.2008.2007228
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