Liquid Phase Deposition Based ${\rm SnO}_{2}$ Gas Sensor Integrated With TaN Heater on a Micro-Hotplate

Authors

Keywords

Journal

Volume 13, Issue 6, Pages 2466-2473

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2013-04-05

DOI

10.1109/jsen.2013.2256780

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