Implementation of high-performance MEMS platinum micro-hotplate

A Novel Three-Dimensional Microheater

(2011) Lei Xu et al.   IEEE ELECTRON DEVICE LETTERS

Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

(2011) Woo-Jin Hwang et al.   SENSORS

Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics

(2010) Gwiy-Sang Chung et al.   MICROELECTRONIC ENGINEERING

Fabrication and characterization of MEMS-based flow sensors based on hot films

(2010) Rong-Hua Ma et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A high-temperature MEMS heater using suspended silicon structures

(2009) Kook-Nyung Lee et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate

(2008) Jungchul Lee et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Reliability improvement of suspended platinum-based micro-heating elements

(2007) J. Courbat et al.   SENSORS AND ACTUATORS A-PHYSICAL