Design, development and reliability testing of a low power bridge-type micromachined hotplate

Published 2015 View Full Article

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Title
Design, development and reliability testing of a low power bridge-type micromachined hotplate
Authors
Keywords
Low power consumption, Microhotplate, Pt, Bridge-type SiO, 2, membrane, Reliability
Journal
MICROELECTRONICS RELIABILITY
Volume 55, Issue 6, Pages 937-944
Publisher
Elsevier BV
Online
2015-04-23
DOI
10.1016/j.microrel.2015.03.005

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