Effect of sputtering power on surface characteristics and crystal quality of AlN films deposited by pulsed DC reactive sputtering

Determination of the Temperature Dependent Thermal Expansion Coefficients of Bulk AlN by HRXRD

(2016) H. Kröncke et al.   ACTA PHYSICA POLONICA A

Effect of nitrogen flow ratio on the structural and optical properties of aluminum nitride thin films

(2011) Shinho Cho   JOURNAL OF CRYSTAL GROWTH

Nitridation behavior of sapphire using a carbon-saturated N2–CO gas mixture

(2010) Hiroyuki Fukuyama et al.   JOURNAL OF APPLIED PHYSICS

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

Effects of Substrate Plane on the Growth of High Quality AlN by Hydride Vapor Phase Epitaxy

(2009) Jiejun Wu et al.   Applied Physics Express

Effects of pulse parameters on the pulsed-DC reactive sputtering of AlN thin films

(2009) J.S. Cherng et al.   VACUUM