Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Published 2018 View Full Article

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Title
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 343, Issue -, Pages 2-6
Publisher
Elsevier BV
Online
2018-01-31
DOI
10.1016/j.surfcoat.2018.01.046

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