Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

(2011) Owen J. Hildreth et al.   ADVANCED FUNCTIONAL MATERIALS

Strategies for controlling Si nanowire formation during Au-assisted electroless etching

(2011) Dae Ho Lee et al.   JOURNAL OF MATERIALS CHEMISTRY

Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon

(2010) Konrad Rykaczewski et al.   ACS Applied Materials & Interfaces

Metal-Catalyzed Etching of Vertically Aligned Polysilicon and Amorphous Silicon Nanowire Arrays by Etching Direction Confinement

(2010) Shih-wei Chang et al.   ADVANCED FUNCTIONAL MATERIALS

Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon

(2010) Konrad Rykaczewski et al.   ADVANCED MATERIALS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

High-Performance Silicon Nanohole Solar Cells

(2010) Kui-Qing Peng et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles

(2010) Huan Chen et al.   NANO LETTERS

Interference lithographically defined and catalytically etched, large-area silicon nanocones from nanowires

(2010) M K Dawood et al.   NANOTECHNOLOGY

Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching

(2010) Johannes de Boor et al.   NANOTECHNOLOGY

Erratum: Enhanced absorption and carrier collection in Si wire arrays for photovoltaic applications

(2010) Michael D. Kelzenberg et al.   NATURE MATERIALS

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Nanostructured Silicon Anodes for Lithium Ion Rechargeable Batteries

(2009) Ranganath Teki et al.   Small

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Nanoscale three dimensional pattern formation in light emitting porous silicon

(2008) Ik Su Chun et al.   APPLIED PHYSICS LETTERS

Silicon nanopillar substrates for enhancing signal intensity in DNA microarrays

(2008) B. Ramana Murthy et al.   BIOSENSORS & BIOELECTRONICS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA

Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

(2008) W. K. Choi et al.   NANO LETTERS

Crystalline-Amorphous Core−Shell Silicon Nanowires for High Capacity and High Current Battery Electrodes

(2008) Li-Feng Cui et al.   NANO LETTERS

Enhanced thermoelectric performance of rough silicon nanowires

(2008) Allon I. Hochbaum et al.   NATURE

Characteristic stability of bare Au-water nanofluids fabricated by pulsed laser ablation in liquids

(2008) Ho Jin Kim et al.   OPTICS AND LASERS IN ENGINEERING