Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

Published 2008 View Full Article

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Title
Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 18, Issue 19, Pages 3026-3035
Publisher
Wiley
Online
2008-09-22
DOI
10.1002/adfm.200800371
References
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