Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon

Published 2010 View Full Article

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Title
Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 2, Issue 4, Pages 969-973
Publisher
American Chemical Society (ACS)
Online
2010-04-01
DOI
10.1021/am1000773

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