Interference lithographically defined and catalytically etched, large-area silicon nanocones from nanowires

Title
Interference lithographically defined and catalytically etched, large-area silicon nanocones from nanowires
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 21, Issue 20, Pages 205305
Publisher
IOP Publishing
Online
2010-04-27
DOI
10.1088/0957-4484/21/20/205305

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