Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching

Published 2010 View Full Article

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Title
Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 9, Pages 095302
Publisher
IOP Publishing
Online
2010-01-30
DOI
10.1088/0957-4484/21/9/095302

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