Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

Published 2008 View Full Article

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Title
Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching
Authors
Keywords
-
Journal
NANO LETTERS
Volume 8, Issue 11, Pages 3799-3802
Publisher
American Chemical Society (ACS)
Online
2008-10-28
DOI
10.1021/nl802129f

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