Lithography, metrology and nanomanufacturing

Nanoscale Manufacturing Enabled by Imprint Lithography

(2011) S.V. Sreenivasan   MRS BULLETIN

Projection Charged Particle Nanolithography and Nanopatterning

(2010) Hans Loeschner et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Printed electronics: the challenges involved in printing devices, interconnects, and contacts based on inorganic materials

(2010) Jolke Perelaer et al.   JOURNAL OF MATERIALS CHEMISTRY

High-speed and drop-on-demand printing with a pulsed electrohydrodynamic jet

(2010) S Mishra et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Device Architecture and Precision Nanofabrication of Microring-Resonator Filter Banks for Integrated Photonic Systems

(2010) CharlesW. Holzwarth et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Integration of Directed Self-Assembly with 193 nm Lithography

(2010) Daniel P. Sanders et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films

(2010) Mark P. Stoykovich et al.   MACROMOLECULES

Nanometrology using a through-focus scanning optical microscopy method

(2010) Ravikiran Attota et al.   MEASUREMENT SCIENCE and TECHNOLOGY

Recent advances in DNA-based directed assembly on surfaces

(2010) Albert M. Hung et al.   Nanoscale

Beam pen lithography

(2010) Fengwei Huo et al.   Nature Nanotechnology

Dispensing nano–pico droplets and liquid patterning by pyroelectrodynamic shooting

(2010) P. Ferraro et al.   Nature Nanotechnology

Block Copolymer Self-Assembly–Directed Single-Crystal Homo- and Heteroepitaxial Nanostructures

(2010) Hitesh Arora et al.   SCIENCE

Block-Copolymer-Based Plasmonic Nanostructures

(2009) Peter A. Mistark et al.   ACS Nano

Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

(2009) Se Hyun Ahn et al.   ACS Nano

Impact of Nanotechnology on Drug Delivery

(2009) Omid C. Farokhzad et al.   ACS Nano

Inkjet Printing-Process and Its Applications

(2009) Madhusudan Singh et al.   ADVANCED MATERIALS

Future Options for HDD Storage

(2009) Y. Shiroishi et al.   IEEE TRANSACTIONS ON MAGNETICS

Copper Multilayer Interconnection Using Ultravaiolet Nanoimprint Lithography with a Double-Deck Mold and Electroplating

(2009) Noriyasu Nagai et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Fabrication of conductive metal lines by plate-to-roll pattern transfer utilizing edge dewetting and flexographic printing

(2009) Moon Kyu Kwak et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

Directed Self-assembly on Sparse Chemical Patterns for Lithographic Applications

(2009) Joy Y. Cheng et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Extension Options for 193nm Immersion Lithography

(2009) Paul A. Zimmerman   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

REBL: A novel approach to high speed maskless electron beam direct write lithography

(2009) Paul Petric et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Atomic precision lithography on Si

(2009) J. N. Randall et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Forbidden pitch improvement using modified illumination in lithography

(2009) M. L. Ling et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces

(2009) T. Hofmann et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Scalable, Shape-Specific, Top-Down Fabrication Methods for the Synthesis of Engineered Colloidal Particles

(2009) Timothy J. Merkel et al.   LANGMUIR

Measuring the Structure of Epitaxially Assembled Block Copolymer Domains with Soft X-ray Diffraction

(2009) Gila E. Stein et al.   MACROMOLECULES

The Future of Lithography: SEMATECH Litho Forum 2008

(2008) C. Grant Willson et al.   ACS Nano

Dense Self-Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers

(2008) Joy Y. Cheng et al.   ADVANCED MATERIALS

Atomic-Scale Templates Patterned by Ultrahigh Vacuum Scanning Tunneling Microscopy on Silicon

(2008) Michael A. Walsh et al.   Annual Review of Physical Chemistry

Fabrication challenges for patterned recording media

(2008) B.D. Terris   JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Nanomaterials for biomedical applications

(2008) Y Charles Cao   Nanomedicine

Flying plasmonic lens in the near field for high-speed nanolithography

(2008) Werayut Srituravanich et al.   Nature Nanotechnology

Patterned Media: Nanofabrication Challenges of Future Disk Drives

(2008) E.A. Dobisz et al.   PROCEEDINGS OF THE IEEE

The effect of particle design on cellular internalization pathways

(2008) S. E. A. Gratton et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Polymer Pen Lithography

(2008) F. Huo et al.   SCIENCE

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Colloid Science of Metal Nanoparticle Catalysts in 2D and 3D Structures. Challenges of Nucleation, Growth, Composition, Particle Shape, Size Control and Their Influence on Activity and Selectivity

(2008) Gabor A. Somorjai et al.   TOPICS IN CATALYSIS

Nanoimprint lithography based fabrication of shape-specific, enzymatically-triggered smart nanoparticles

(2007) Luz Cristal Glangchai et al.   JOURNAL OF CONTROLLED RELEASE