Integration of Directed Self-Assembly with 193 nm Lithography

Published 2010 View Full Article

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Title
Integration of Directed Self-Assembly with 193 nm Lithography
Authors
Keywords
-
Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 1, Pages 11-18
Publisher
Technical Association of Photopolymers, Japan
Online
2010-07-16
DOI
10.2494/photopolymer.23.11

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