Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces

Title
Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 3238
Publisher
American Vacuum Society
Online
2009-12-15
DOI
10.1116/1.3253608

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