Directed Self-assembly on Sparse Chemical Patterns for Lithographic Applications

Title
Directed Self-assembly on Sparse Chemical Patterns for Lithographic Applications
Authors
Keywords
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Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 22, Issue 2, Pages 219-222
Publisher
Technical Association of Photopolymers, Japan
Online
2009-08-07
DOI
10.2494/photopolymer.22.219

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