4.4 Article Proceedings Paper

Effect of stage control parameters on the FIB milling process

Journal

THIN SOLID FILMS
Volume 516, Issue 19, Pages 6710-6714

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.11.102

Keywords

FIB; etching; micromilling; design of experiment; re-deposition

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The extended application of focused ion beam (FIB) technology is dependent on the complicated reciprocal relation of operating parameters, which influence the FIB processes. Undesired surface damage by the FIB milling process must be reduced for successful and efficient modifications on the surface of a silicon substrate. In general, the dwell time, the beam irradiated pixel spacing, and the pattern size were considered as the stage control parameters during the milling process. In order to reduce the surface damage, the influence of the parameters on FIB milling process was examined with respect to the dimensions of the milled pattern. (C) 2007 Elsevier B.V. All rights reserved.

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