Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection

Published 2008 View Full Article

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Title
Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 23, Pages 235304
Publisher
IOP Publishing
Online
2008-05-07
DOI
10.1088/0957-4484/19/23/235304

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