Nano fabrication of star structure for precision metrology developed by focused ion beam direct writing

Published 2012 View Full Article

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Title
Nano fabrication of star structure for precision metrology developed by focused ion beam direct writing
Authors
Keywords
-
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 61, Issue 1, Pages 511-514
Publisher
Elsevier BV
Online
2012-04-17
DOI
10.1016/j.cirp.2012.03.118

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