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Title
Applications of nanoimprint lithography/hot embossing: a review
Authors
Keywords
Electron Beam Lithography, High Electron Mobility Transistor, Etch Mask, Ferroelectric Polymer, Nanofluidic Channel
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 121, Issue 2, Pages 451-465
Publisher
Springer Nature
Online
2015-06-30
DOI
10.1007/s00339-015-9071-x
References
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