Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

Published 2011 View Full Article

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Title
Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2100-2104
Publisher
Elsevier BV
Online
2011-02-10
DOI
10.1016/j.mee.2011.02.044

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