Self-aligned ALD AlOx T-gate insulator for gate leakage current suppression in SiNx-passivated AlGaN/GaN HEMTs

Published 2010 View Full Article

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Title
Self-aligned ALD AlOx T-gate insulator for gate leakage current suppression in SiNx-passivated AlGaN/GaN HEMTs
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 54, Issue 10, Pages 1098-1104
Publisher
Elsevier BV
Online
2010-06-29
DOI
10.1016/j.sse.2010.05.024

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