Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint

Published 2008 View Full Article

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Title
Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 910-913
Publisher
Elsevier BV
Online
2008-01-15
DOI
10.1016/j.mee.2007.12.060

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