Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer

Published 2008 View Full Article

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Title
Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 1238-1242
Publisher
Elsevier BV
Online
2008-12-25
DOI
10.1016/j.mee.2008.12.022

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