Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography

Published 2011 View Full Article

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Title
Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2037-2040
Publisher
Elsevier BV
Online
2011-01-29
DOI
10.1016/j.mee.2011.01.055

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