Surface chemistry of copper metal and copper oxide atomic layer deposition from copper(ii) acetylacetonate: a combined first-principles and reactive molecular dynamics study

Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2

(2015) Guo-Yong Fang et al.   CHEMICAL COMMUNICATIONS

Quantum chemical and solution phase evaluation of metallocenes as reducing agents for the prospective atomic layer deposition of copper

(2015) Gangotri Dey et al.   DALTON TRANSACTIONS

Quantum Chemical Study of the Effect of Precursor Stereochemistry on Dissociative Chemisorption and Surface Redox Reactions During the Atomic Layer Deposition of the Transition Metal Copper

(2015) Gangotri Dey et al.   Journal of Physical Chemistry C

Precursor Adsorption on Copper Surfaces as the First Step during the Deposition of Copper: A Density Functional Study with van der Waals Correction

(2015) Yasheng Maimaiti et al.   Journal of Physical Chemistry C

Simulation of ALD chemistry of (nBu3P)2Cu(acac) and Cu(acac)2 precursors on Ta(110) surface

(2015) Xiao Hu et al.   MICROELECTRONIC ENGINEERING

Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy

(2014) Dileep Dhakal et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of copper nitride film and its application to copper seed layer for electrodeposition

(2014) Jae-Min Park et al.   THIN SOLID FILMS

Copper reduction and atomic layer deposition by oxidative decomposition of formate by hydrazine

(2014) Gangotri Dey et al.   RSC Advances

Multiple Proton Diffusion and Film Densification in Atomic Layer Deposition Modeled by Density Functional Theory

(2013) Mahdi Shirazi et al.   CHEMISTRY OF MATERIALS

Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces

(2013) Taeseung Kim et al.   CHEMISTRY OF MATERIALS

Precursors and chemistry for the atomic layer deposition of metallic first row transition metal films

(2013) Thomas J. Knisley et al.   COORDINATION CHEMISTRY REVIEWS

Improved Step Coverage of Cu Seed Layers by Magnetic-Field-Assisted Ionized Sputtering

(2013) Yuta Sakamoto et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Competing reactions during metalorganic deposition: Ligand-exchange versus direct reaction with the substrate surface

(2013) Jia-Ming Lin et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Copper(I) carbene hydride complexes acting both as reducing agent and precursor for Cu ALD: a study through density functional theory

(2013) Gangotri Dey et al.   THEORETICAL CHEMISTRY ACCOUNTS

Preventing thermolysis: precursor design for volatile copper compounds

(2012) Jason P. Coyle et al.   CHEMICAL COMMUNICATIONS

Atomic Layer Deposition of Copper Oxide using Copper(II) Acetylacetonate and Ozone

(2012) Mari Endresen Alnes et al.   CHEMICAL VAPOR DEPOSITION

Mechanism for the Atomic Layer Deposition of Copper Using Diethylzinc as the Reducing Agent: A Density Functional Theory Study Using Gas-Phase Molecules as a Model

(2012) Gangotri Dey et al.   JOURNAL OF PHYSICAL CHEMISTRY A

Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation

(2012) Guoyong Fang et al.   Journal of Physical Chemistry C

The Surface Chemistry of Atomic Layer Depositions of Solid Thin Films

(2012) Francisco Zaera   Journal of Physical Chemistry Letters

Chemistry of Cu(acac)2 on Ni(110) and Cu(110) surfaces: Implications for atomic layer deposition processes

(2012) Qiang Ma et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

ReaxFF molecular dynamics simulation of thermal stability of a Cu3(BTC)2 metal–organic framework

(2012) Liangliang Huang et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Atomic-scale simulation of ALD chemistry

(2012) Simon D Elliott   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

In situ Reaction Mechanism Studies on Atomic Layer Deposition of Ir and IrO2from Ir(acac)3

(2011) Kjell Knapas et al.   CHEMISTRY OF MATERIALS

Low Temperature Growth of High Purity, Low Resistivity Copper Films by Atomic Layer Deposition

(2011) Thomas J. Knisley et al.   CHEMISTRY OF MATERIALS

Multinuclear Copper(I) Guanidinate Complexes

(2011) Alexander M. Willcocks et al.   INORGANIC CHEMISTRY

Influence of Alkalinity and Steric Hindrance of Lewis-Base Catalysts on Atomic Layer Deposition of SiO2

(2011) Shuang Chen et al.   Journal of Physical Chemistry C

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Development and Validation of a ReaxFF Reactive Force Field for Cu Cation/Water Interactions and Copper Metal/Metal Oxide/Metal Hydroxide Condensed Phases

(2010) Adri C. T. van Duin et al.   JOURNAL OF PHYSICAL CHEMISTRY A

Development of a ReaxFF Reactive Force Field for Glycine and Application to Solvent Effect and Tautomerization

(2010) Obaidur Rahaman et al.   JOURNAL OF PHYSICAL CHEMISTRY B

ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems

(2010) Thomas Waechtler et al.   MICROELECTRONIC ENGINEERING

Low-Temperature Atomic Layer Deposition of Copper Metal Thin Films: Self-Limiting Surface Reaction of Copper Dimethylamino-2-propoxide with Diethylzinc

(2009) Byoung H. Lee et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]

(2009) Thomas Waechtler et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone

(2008) Jinhee Kwon et al.   CHEMISTRY OF MATERIALS

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

(2008) David N. Goldstein et al.   Journal of Physical Chemistry C

Synthesis and Thermal Chemistry of Copper (I) Guanidinates

(2007) Jason P. Coyle et al.   INORGANIC CHEMISTRY