Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces

Title
Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 25, Issue 18, Pages 3630-3639
Publisher
American Chemical Society (ACS)
Online
2013-09-09
DOI
10.1021/cm401707h

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