Competing reactions during metalorganic deposition: Ligand-exchange versus direct reaction with the substrate surface

Title
Competing reactions during metalorganic deposition: Ligand-exchange versus direct reaction with the substrate surface
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 2, Pages 021401
Publisher
American Vacuum Society
Online
2013-01-09
DOI
10.1116/1.4774031

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