Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2

Chemical reactions during plasma-enhanced atomic layer deposition of SiO2films employing aminosilane and O2/Ar plasma at 50 °C

(2013) Yi Lu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Rapid atomic layer deposition of silica nanolaminates: synergistic catalysis of Lewis/Brønsted acid sites and interfacial interactions

(2013) Guoyong Fang et al.   Nanoscale

Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation

(2012) Guoyong Fang et al.   Journal of Physical Chemistry C

Discharge kinetics of inductively coupled oxygen plasmas: experiment and model

(2012) C S Corr et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Temperature dependence of SiO2 film growth with plasma-enhanced atomic layer deposition

(2012) Akiko Kobayashi et al.   THIN SOLID FILMS

On the Mechanisms of SiO2 Thin-Film Growth by the Full Atomic Layer Deposition Process Using Bis(t-butylamino)silane on the Hydroxylated SiO2(001) Surface

(2011) Bo Han et al.   Journal of Physical Chemistry C

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition

(2011) S Tinck et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical

(2010) Seok-Jun Won et al.   IEEE ELECTRON DEVICE LETTERS

Low-temperature synthesis of nanoscale silica multilayers – atomic layer deposition in a test tube

(2010) Benjamin Hatton et al.   JOURNAL OF MATERIALS CHEMISTRY

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy

(2009) B. B. Burton et al.   Journal of Physical Chemistry C

Rapid SiO2Atomic Layer Deposition Using Tris(tert-pentoxy)silanol

(2008) B. B. Burton et al.   CHEMISTRY OF MATERIALS