Reliability Characteristics of Ferroelectric $ \hbox{Si:HfO}_{2}$ Thin Films for Memory Applications

标题
Reliability Characteristics of Ferroelectric $ \hbox{Si:HfO}_{2}$ Thin Films for Memory Applications
作者
关键词
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出版物
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-08-30
DOI
10.1109/tdmr.2012.2216269

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