Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry

Al2O3/InGaAs Metal-Oxide-Semiconductor Interface Properties: Impact of Gd2O3and Sc2O3Interfacial Layers by Atomic Layer Deposition

(2014) M. Ameen et al.   ECS Journal of Solid State Science and Technology

A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies

(2013) J. Lubeck et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy

(2012) P. Hönicke et al.   JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY

L-subshell fluorescence yields and Coster-Kronig transition probabilities with a reliable uncertainty budget for selected high- and medium-Zelements

(2012) Michael Kolbe et al.   PHYSICAL REVIEW A

Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions

(2011) Rainer Unterumsberger et al.   ANALYTICAL CHEMISTRY

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

(2011) Annelies Delabie et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Depth profile characterization of ultra shallow junction implants

(2009) Philipp Hönicke et al.   ANALYTICAL AND BIOANALYTICAL CHEMISTRY

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Total reflection X-ray fluorescence and grazing incidence X-ray spectrometry — Tools for micro- and surface analysis. A review

(2009) Alex von Bohlen   SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY

Modelling the response function of energy dispersive X-ray spectrometers with silicon detectors

(2009) F. Scholze et al.   X-RAY SPECTROMETRY

Reference-free X-ray spectrometry based on metrology using synchrotron radiation

(2008) Burkhard Beckhoff   JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY