Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing

出版年份 2017 全文链接

标题

作者

关键词

Zirconia, Ferroelectricity, Atomic layer deposition, Thin films, TEM

出版物

Volume 37, Issue 3, Pages 1135-1139

出版商

Elsevier BV

发表日期

2016-10-26

DOI

10.1016/j.jeurceramsoc.2016.10.028

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