Induction of ferroelectricity in nanoscale ZrO 2 /HfO 2 bilayer thin films on Pt/Ti/SiO 2 /Si substrates

标题
Induction of ferroelectricity in nanoscale ZrO 2 /HfO 2 bilayer thin films on Pt/Ti/SiO 2 /Si substrates
作者
关键词
Hafnia, Zirconia, Ferroelectricity, Bilayer thin films, TEM
出版物
ACTA MATERIALIA
Volume 115, Issue -, Pages 68-75
出版商
Elsevier BV
发表日期
2016-06-04
DOI
10.1016/j.actamat.2016.05.029

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