Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation

出版年份 2019 全文链接

标题

作者

关键词

CMOS, BEOL, MEMS, PECVD, Silicon nitride, Silicon oxide, Microheater, Microfabrication, Gas sensor, Residual stress, Elastic modulus

出版物

SENSORS AND ACTUATORS B-CHEMICAL

Volume 292, Issue -, Pages 225-232

出版商

Elsevier BV

发表日期

2019-04-24

DOI

10.1016/j.snb.2019.04.116

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