High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

标题
High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution
作者
关键词
Optical lithography, Resolution enhancement technologies, Electron beam lithography, Throughput, Multi-beams
出版物
MICROELECTRONIC ENGINEERING
Volume 133, Issue -, Pages 23-35
出版商
Elsevier BV
发表日期
2014-11-29
DOI
10.1016/j.mee.2014.11.015

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