Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources
出版年份 2020 全文链接
标题
Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources
作者
关键词
-
出版物
Beilstein Journal of Nanotechnology
Volume 11, Issue -, Pages 1742-1749
出版商
Beilstein Institut
发表日期
2020-11-18
DOI
10.3762/bjnano.11.156
参考文献
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