A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
出版年份 2021 全文链接
标题
A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
作者
关键词
FET-type gas sensor, Low power consumption, Micro-heater, Indium oxide (In, 2, O, 3, ) film, NO, 2, gas, Air gap
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 334, Issue -, Pages 129642
出版商
Elsevier BV
发表日期
2021-02-16
DOI
10.1016/j.snb.2021.129642
参考文献
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